New component type for CMS machines
|
Name |
Type |
System distance |
Component type |
|---|---|---|---|
|
CMS 530 |
642 |
5 inches |
002 |
|
643 |
6 inches |
002 | |
|
CMS 822 |
623 |
5 inches |
005 |
|
632 |
6 inches |
005 |
|
Name |
Type |
System distance |
Component type |
|---|---|---|---|
|
CMS 530 |
642 |
5 inches |
002 |
|
643 |
6 inches |
002 | |
|
CMS 822 |
623 |
5 inches |
005 |
|
632 |
6 inches |
005 |